Monitoring & Diagnostics
| Global View | ||
| Utilization Rate | WPH | Thickness |
While drowning in data but starving for information, let our Fab-@-a-Glance visualized manufacturing intelligence turns production data into real-time information to analyze manufacturing trends and improve Overall Tool Efficiency. Quartet Mechanics offers the remote diagnostics and web-based Fab-@-A-Glance tool performance monitoring system to reduce the trouble shooting cost and enable exception management.
Whenever monitored parameters deviate beyond pre-determined limits, an alarm email will be triggered to begin troubleshooting the problem by checking the real-time and historical operating data. The web-based charting brings consistent visualization of production performance that enables global collaboration to diagnose the root cause of the problem in realtime mode. Our system can combine two analysis groups into one for easier site-to-site, tool-to-tool, recipe-to-recipe benchmarking; and category shading in control charts that enhance statistical process control (SPC) analysis by highlighting. It features configurable time range and drill-down function for
better data aggregation/segregation and data retrieval. Security is always the biggest concern of implementing e-diagnostics. Our system has a Secure Sockets Layer (SSL) that can be configured to secure data transfer within browser-based tools. Access control or user entitlement is also available to allow a managed sharing of the production information.
Web-based Visualized Manufacturing Intelligence- Predictable. Preventative. Productive.
The chart below demonstrates how a wafer ID is tracked for a set of process tools. It can display in a tool view, lot view, cassette view (with the associated wafer ID's). It also shows the productivity trend of each tool for your to identify the bottleneck of your manufacturing floor. Such information can be easily selected by a range of time by using the cursor or entering the date range.
Wafer Thickness Monitoring
Fab-@-A-Glance monitoring system will let you viusalize the trend of the thickness by time, by wafer ID, by lot, by recipe, by shift, by tool, by site. Any out of specification operation will be red-flagged during any process step.
Wafer ID OCR Read-Fail Tracking
When a wafer ID read-fail is related to a misaligned wafer or inconsistent format or location of scribe, multiple OCR configurations are employed. To save the reading time, the process of the OCR software sequentially trying all configurations until success or reporting a failure-read shall be minimized. This read-fail report can help decide which configuration shall be removed or modified to bring up the tool's throughput.
Tool's Utilization
The tool utilization rate graph allows you to see in real time the fluctuations of the tool's usage, along with the cause of any low-level rates. It also shows the past utilization rate upon selection of previous dates.
