Unlimited wafer handling possibilities – Automation solutions – Components – System upgrades

Tool Automation

Quartet Mechanics not only provides the building blocks for your robotic automation project, but is also a full service engineering & system integration company which develops and installs robotic-based work cells & integrated systems for wafer handling to meet class 1 to 100 cleanliness requirements.

Automatic System using Robotics

Tool Types

EFEM (Equipment Front End Module)/Custom System

SEMI-standard, BOLTS-ccmpliant to fully custom-made

The modularity of our robotic work cell enables fast installation while still accommodating your unique needs. Other strengths include:

  • Highly configurable to your needs: supports FOUP, FOSB, SMIF or open cassette
  • 2-wide, 3-wide (trackless) and 4-wide (with track)
  • System with miini-environment (class 1-1000) or tabletop, bridge tool with minimum change-over
  • Smallest footprint in the market with a true SCARA robot
  • User-defined recipe-driven; optional SECS/GEM communicaiton to fab host.
Wafer Sorter/Stocker (for thin to thick wafer)

Multi-functional Sorting Solution

  • Bridge for 4”, 6”, 8”, 12" wafers (minimal adjustment), 2-8 load-ports for carriers
  • Handles/flips from sub 100 microns thin or warped wafer to 6.0mm thick wafer
  • Top- or bottom-pick, non-contact patented "soft-touch" edge gripper (grips on the exclusion zone)
  • Highly configurable to your needs: supports FOUP, FOSB, SMIF or open cassette
  • Handles from sub 100 microns thin or warped wafer to 6mm thick
  • Ultra-slim gripper and tip faciliates small pitch, low clearance applications (Standard 6" wafer cassette with pitch 4.76mm used for 1.2mm thick wafer)
  • Reads wafer ID’s (OCR, barcode, 2D matrix) from standard, clear, semi-transparent substrates
  • 2-sided ID reading and/or inspection enabled by the ±275° flipping edge-gripper
  • Versatile SCARA robot allows for compact tool layout
  • User-configurable recipe execution fully automatic or manual with operator prompts
  • Mini-environment or table-top layouts available for most applicat
  • Optional SECS/GEM compliant connection, wafer ID marking and tracking, integrated customized metrology module (e.g.wafer thickness, TTV, edge defect or notch depth) offered by our partners
Coin-Stacking Jar Pack and Unpack System

Economical & High Though-put

The tools available in the market are very often high in price and offers unreasonable loth through-put. Quartet Mechanics' new coin-stacking jar pack/unpack system permits a safe and affordable alternative for manual operations.

  • High-through-put 80-120 WPH
  • Proprietary fail-proof safety mechanism for wafer's protection
  • Bridge tool for 150/200/300mm, mixed flats or notch, and full range of wafer thickness (thin/warped and thick wafers)
  • Configurable to accommodate all SEMI-standard carriers including FOUP, FOSB, cassette
  • User-configurable sorting functionality
  • Highly reliability paper/wafer differentiation capability
  • All the features in above mentioned Wafer Sorter/Stocker solution available
High Precision MEMS Wafer Handling System

MEMS devices typically are so fragile that human handling of the them contributes to lower production yield. To achieve the proper functionality, the MEMS must be placed to a high degree of accuracy and repeatability in all six degrees of freedom: X, Y, Z, theta, pitch and roll. Any variation in the MEMS placement will seriously affect the process yield. Quartet Mechanics can help MEMS foundry or equipment maker to automate the wafer level packaging with our wafer handling solution for full range of wafer thickness and our machine vision alignment & placement to achieve the tight tolerance demanded in MEMS manufacturing. (Also see our precision manufacturing)

Bio-medical System

Because of the complexity involved in production, the healthcare and pharmaceutical sectors lag far behind other industries in terms of automation. Quartet Mechanics uses its experience in cleanroom automation, providing micro-plate handling with a variety of robotic reach and axis movement. For barrier isolator systems, Vaporous hydrogen peroxide (VHP) compatible robots from both Innovative Robotics and Staubli make it easy to be used in caustic environment (such as hydrogen peroxide steam for sterilization) to improve the productivity, cleanliness and operator safety.

Request for Datasheet

This is an HTML-Template by Ruven Pelka. You can purchase it at mojo-themes.com.